EPI Centura Quartz

0200-35084/0200-35007 Upper Dome (ATM/RP) 

0200-35024/0200-35017 Upper Liner (ATM/RP) 

0200-35065/0200-35023 Lower Liner (ATM/RP)

0200-00412 SHAFT_SUSCEPTOR SUPPORT

0200-35424 WAFER LIFT SHAFT 8” 

0200-35019 Centura QZ Insert 

0200-35020 Rev.1 Inject Baffle Fixed Type