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Upgrades/Replacement
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EPI
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Equipment list
Total
9
RPS Upgrade (Remote Plasma Cleaning System)
Susceptor Height Aligner
CENTURA PICO FUSE FINDER
Novellus C1 Software Upgrade
Cool Chamber Wafer Detect System
Digital PCW Flowmeter
Centura - PT Sensor
Blower PT DIsplay
Motorized Rotation Assy
1
