ASM
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Information
150mm, 200mm EPI
Specification
| Model | Epsilon 2000 |
|---|---|
| process | EPITAXIAL SILICON | Pressure Condition | ATM/RP |
| Manufacturer | ASM |
첨부파일
- EPSILON2000_main.png (190.8K) 0회 다운로드 | DATE : 2019-10-14 21:20:19
- EPSILON2000_main.png (190.8K) 0회 다운로드 | DATE : 2019-10-14 21:20:19
- EPSILON2000_main.png (190.8K) 0회 다운로드 | DATE : 2019-10-14 21:20:19
