NOVELLUS C2
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Information
150mm, 200mm
CxZ, WxZ
Specification
| Model | NOVELLUS C2 SEQUEL |
|---|---|
| process | PECVD | Pressure Condition | NITRIDE,OXIDE,TEOS |
| Manufacturer | NOVELLUS |
150mm, 200mm
CxZ, WxZ
| Model | NOVELLUS C2 SEQUEL |
|---|---|
| process | PECVD | Pressure Condition | NITRIDE,OXIDE,TEOS |
| Manufacturer | NOVELLUS |
