NOVELLUS SPEED
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Information
150mm, 200mm
PSG, BPSG, UDO, TEOS, HDP
Specification
| Model | NOVELLUS SPEED HDP |
|---|---|
| process | HDP | Pressure Condition | NITRIDE,OXIDE,TEOS |
| Manufacturer | NOVELLUS |
첨부파일
- novellus_speed_hdp.png (241.4K) 0회 다운로드 | DATE : 2019-10-14 21:29:20
- novellus_speed_hdp.png (241.4K) 0회 다운로드 | DATE : 2019-10-14 21:29:20
- novellus_speed_hdp.png (241.4K) 0회 다운로드 | DATE : 2019-10-14 21:29:20
